Invention Grant
- Patent Title: High-efficiency line-forming optical systems and methods using a serrated spatial filter
-
Application No.: US16511136Application Date: 2019-07-15
-
Publication No.: US11415809B2Publication Date: 2022-08-16
- Inventor: Serguei Anikitchev
- Applicant: Veeco Instruments Inc.
- Applicant Address: US NY Plainview
- Assignee: Veeco Instruments Inc.
- Current Assignee: Veeco Instruments Inc.
- Current Assignee Address: US NY Plainview
- Agency: Downs Rachlin Martin PLLC
- Main IPC: G02B27/09
- IPC: G02B27/09 ; H01L21/268 ; G02B19/00

Abstract:
High-efficiency line-forming optical systems and methods that employ a serrated aperture are disclosed. The line-forming optical system includes a laser source, a beam conditioning optical system, a first aperture device, and a relay optical system that includes a second aperture device having the serrated aperture. The serrated aperture is defined by opposing serrated blades configured to reduce intensity variations in a line image formed at an image plane as compared to using an aperture having straight-edged blades.
Public/Granted literature
- US20190339536A1 High-Efficiency Line-Forming Optical Systems and Methods Using A Serrated Spatial Filter Public/Granted day:2019-11-07
Information query