Invention Grant
- Patent Title: Chemical supply structure and a developing apparatus having the same
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Application No.: US16445969Application Date: 2019-06-19
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Publication No.: US11415889B2Publication Date: 2022-08-16
- Inventor: Jong-Keun Oh , Kyoung-Noh Kim , Man-Kyu Kang , Byung-Gook Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2018-0136286 20181108
- Main IPC: G03G15/10
- IPC: G03G15/10 ; G03F7/30 ; B05B1/00 ; B05C5/00 ; H01L21/67 ; B41J2/16 ; G03F7/20 ; G03F7/00 ; G03F7/32 ; B05B1/28 ; B05C5/02 ; B05C11/10 ; H01L21/687

Abstract:
A chemical supply structure includes a bar-shaped body having a plurality of chemical reservoirs in which a plurality of chemicals is individually stored such that the body partially crosses an underlying substrate, a bar-shaped nozzle protruded from a bottom surface of the body and injecting injection chemicals onto the substrate, a plurality of the chemicals being mixed into the injection chemicals, and a hydrophobic unit arranged on the bottom surface of the body and on a side surface of the nozzle such that a mixed solution mixed with the injection chemicals is prevented from adhering to the bottom surface and the side surface by controlling a contact angle of the mixed solution with respect to the bottom surface and the side surface.
Public/Granted literature
- US20200150539A1 CHEMICAL SUPPLY STRUCTURE AND A DEVELOPING APPARATUS HAVING THE SAME Public/Granted day:2020-05-14
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