Invention Grant
- Patent Title: Two-dimensional AIN material and its preparation method and application
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Application No.: US16980059Application Date: 2018-04-26
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Publication No.: US11417522B2Publication Date: 2022-08-16
- Inventor: Wenliang Wang , Guoqiang Li , Yulin Zheng
- Applicant: South China University of Technology
- Applicant Address: CN Guangzhou
- Assignee: South China University of Technology
- Current Assignee: South China University of Technology
- Current Assignee Address: CN Guangzhou
- Agency: The Dobrusin Law Firm, PC
- Priority: CN201810233105.X 20180321
- International Application: PCT/CN2018/084543 WO 20180426
- International Announcement: WO2019/178916 WO 20190926
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L31/18 ; H01L29/778 ; C23C16/02 ; C23C16/30 ; C30B25/18 ; C30B29/40

Abstract:
The present invention discloses a two-dimensional AlN material and its preparation method and application, wherein the preparation method comprises the following steps: (1) selecting a substrate and its crystal orientation; (2) cleaning the surface of the substrate; (3) transferring a graphene layer to the substrate layer; (4) annealing the substrate; (5) using the MOCVD process to introduce H2 to open the graphene layer and passivate the surface of the substrate; and (6) using the MOCVD process to grow a two-dimensional AlN layer. The preparation method of the present invention has the advantages that the process is simple, time saving and efficient. Besides, the two-dimensional AlN material prepared by the present invention can be widely used in HEMT devices, deep ultraviolet detectors or deep ultraviolet LEDs, and other fields.
Public/Granted literature
- US20210020428A1 A Two-Dimensional AlN Material and its Preparation Method and Application Public/Granted day:2021-01-21
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