Invention Grant
- Patent Title: Plurality of different size metal layers for a pad structure
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Application No.: US16876238Application Date: 2020-05-18
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Publication No.: US11417599B2Publication Date: 2022-08-16
- Inventor: Hsien-Wei Chen , Ching-Jung Yang , Chia-Wei Tu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/48 ; H01L21/00 ; H01L21/4763 ; H01L23/528 ; H01L21/48 ; H01L21/768 ; H01L23/498 ; H01L23/532 ; H01L23/522 ; H01L23/00 ; H01L23/31

Abstract:
Methods and apparatus are disclosed for manufacturing metal contacts under ground-up contact pads within a device. A device may comprise a bottom metal layer with a bottom metal contact, a top metal layer with a top metal contact, and a plurality of middle metal layers. Any given metal layer of the plurality of middle metal layers comprises a metal contact, the metal contact is substantially vertically below the top metal contact, substantially vertically above the bottom metal contact, and substantially vertically above a metal contact in any metal layer that is below the given metal layer. The metal contacts may be of various and different shapes. All the metal contacts in the plurality of middle metal layers and the bottom metal contact may be smaller than the top metal contact, therefore occupying less area and saving more area for other functions such as device routing.
Public/Granted literature
- US20200279802A1 Plurality of Different Size Metal Layers for a Pad Structure Public/Granted day:2020-09-03
Information query
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