Invention Grant
- Patent Title: Showerhead for ALD precursor delivery
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Application No.: US16721724Application Date: 2019-12-19
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Publication No.: US11420217B2Publication Date: 2022-08-23
- Inventor: Muhannad Mustafa , Muhammad M. Rasheed
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: C23C16/40
- IPC: C23C16/40 ; B05B1/18 ; B05B1/00 ; C23C16/455 ; C23C16/458 ; H01L21/687

Abstract:
Embodiments of showerheads for use in a process chamber are provided herein. In some embodiments, a showerhead includes a first spiral channel extending from a central region to a peripheral region of the showerhead; a second spiral channel extending from a central region to a peripheral region of the showerhead, wherein the second spiral channel is interleaved with the first spiral channel and fluidly independent from the first spiral channel; a plurality of first channels extending from the first spiral channel to a plurality of first gas distribution holes on a lower surface of the showerhead, wherein each first channel is a singular channel extending at an angle; and a plurality of second channels extending from the second spiral channel to a plurality of second gas distribution holes on the lower surface of the showerhead, wherein each second channel is a singular channel extending at an angle.
Public/Granted literature
- US20210187521A1 SHOWERHEAD FOR ALD PRECURSOR DELIVERY Public/Granted day:2021-06-24
Information query
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