Invention Grant
- Patent Title: Method of decomposing quartz sample, method of analyzing metal contamination of quartz sample, and method of manufacturing quartz member
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Application No.: US16467766Application Date: 2017-12-07
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Publication No.: US11421342B2Publication Date: 2022-08-23
- Inventor: Hirokazu Kato , Takashi Muramatsu
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2016-254381 20161227
- International Application: PCT/JP2017/043899 WO 20171207
- International Announcement: WO2018/123490 WO 20180705
- Main IPC: G01N1/40
- IPC: G01N1/40 ; C30B29/06 ; C30B31/10 ; G01N31/00 ; G01N1/28
Abstract:
Provided is a method of decomposing a quartz sample, which includes contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample, wherein the liquid is a liquid containing at least water; and the mixed acid is a mixed acid of hydrogen fluoride and sulfuric acid, and a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.
Information query
