Invention Grant
- Patent Title: Gallium nitride crystal substrate
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Application No.: US16651716Application Date: 2018-02-23
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Publication No.: US11421344B2Publication Date: 2022-08-23
- Inventor: Yusuke Yoshizumi , Hideki Osada , Shugo Minobe , Yoshiaki Hagi
- Applicant: Sumitomo Electric Industries, Ltd.
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Faegre Drinker Biddle & Reath LLP
- International Application: PCT/JP2018/006656 WO 20180223
- International Announcement: WO2019/163083 WO 20190829
- Main IPC: C30B25/20
- IPC: C30B25/20 ; C30B29/40

Abstract:
A gallium nitride crystal substrate has a diameter of 50-155 mm and a thickness of 300-800 μm and includes any of a flat portion and a notch portion in a part of an outer edge. The gallium nitride crystal substrate contains any of oxygen atoms, silicon atoms, and carriers at a concentration of 2×1017 to 4×1018 cm−3, and has an average dislocation density of 1000 to 5×107 cm−2 in any of a first flat region extending over a width from the flat portion to a position at a distance of 2 mm in a direction perpendicular to a straight line indicating the flat portion in a main surface and a first notch region extending over a width from the notch portion to a position at a distance of 2 mm in a direction perpendicular to a curve indicating the notch portion in the main surface.
Public/Granted literature
- US20200255979A1 GALLIUM NITRIDE CRYSTAL SUBSTRATE Public/Granted day:2020-08-13
Information query
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