Invention Grant
- Patent Title: Shape measurement system, probe tip unit, and shape measurement method
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Application No.: US17338207Application Date: 2021-06-03
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Publication No.: US11421976B2Publication Date: 2022-08-23
- Inventor: Tatsuo Hariyama , Masahiro Watanabe , Atsushi Taniguchi , Kenji Maruno
- Applicant: HITACHI, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI, LTD.
- Current Assignee: HITACHI, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Volpe Koenig
- Priority: JPJP2018-222227 20181128
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B9/02015

Abstract:
Provided is a shape measurement system in order to perform three-dimensional measurement corresponding to a measurement object having various shapes, which includes a measurement probe, a probe tip, and a processor. The probe tip includes an optical element that is configured to irradiate an object with measurement light and a cylindrical unit that is configured to lock the optical element. The processor is configured to calculate an optical path length from the optical element to an object based on reflected light of the measurement light with which the object is irradiated; and calculate a three-dimensional shape of the object based on the input information and the optical path length.
Public/Granted literature
- US20210293524A1 SHAPE MEASUREMENT SYSTEM, PROBE TIP UNIT, AND SHAPE MEASUREMENT METHOD Public/Granted day:2021-09-23
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