Invention Grant
- Patent Title: Photonic quantum dew point sensor
-
Application No.: US16527209Application Date: 2019-07-31
-
Publication No.: US11422101B2Publication Date: 2022-08-23
- Inventor: Tobias K. Herman , Nikolai N. Klimov , Thomas P. Purdy
- Applicant: Government of the United States of America, as represented by the Secretary of Commerce
- Applicant Address: US MD Gaithersburg
- Assignee: Government of the United States of America, as represented by the Secretary of Commerce
- Current Assignee: Government of the United States of America, as represented by the Secretary of Commerce
- Current Assignee Address: US MD Gaithersburg
- Agency: Office of Chief Counsel for National Institute of Standards and Technology
- Main IPC: G01N25/68
- IPC: G01N25/68 ; G01N21/17

Abstract:
A photonic quantum dew point sensor determines a dew point of an analyte and includes a common substrate; a photonic dew sensor on the common substrate and exposed for direct contact with the analyte; a photonic temperature sensor on the common substrate; an optomechanical temperature sensor on the common substrate; a dew sensor substrate interposed between the photonic dew sensor and the common substrate; a heater on the dew sensor substrate proximate to the photonic dew sensor; a temperature sensor substrate interposed between the common substrate and each of the photonic temperature sensor and the optomechanical temperature sensor; and a sensor cover on the photonic temperature sensor, the optomechanical temperature sensor, and the temperature sensor substrate to cover the photonic temperature sensor and the optomechanical temperature sensor to prevent direct contact between the analyte and each of the photonic temperature sensor and the optomechanical temperature sensor.
Public/Granted literature
- US20200041431A1 PHOTONIC QUANTUM DEW POINT SENSOR Public/Granted day:2020-02-06
Information query