Invention Grant
- Patent Title: Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof
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Application No.: US16297858Application Date: 2019-03-11
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Publication No.: US11424143B2Publication Date: 2022-08-23
- Inventor: Koji Yoshii , Tatsuya Yamaguchi , Hiroyuki Hayashi , Mitsuhiro Okada , Satoshi Takagi , Toshihiko Takahashi , Masafumi Shoji , Kazuya Kitamura
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Venjuris, P.C.
- Priority: JPJP2018-045873 20180313
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673

Abstract:
Provided is a heat insulation structure used for a vertical heat treatment apparatus that performs a heat treatment on a substrate. The vertical heat treatment apparatus includes: a processing container having a double tube structure including an inner tube and an outer tube closed upward, the processing container having an opening at a lower end thereof; a gas supply section and exhaust section provided on a lower side of the processing container; a lid configured to introduce or discharge the substrate into or from the opening and to open/close the opening; and a heating section provided to cover the processing container from an outside. The heat insulation structure is provided between the inner tube and the outer tube.
Public/Granted literature
- US20190287828A1 HEAT INSULATION STRUCTURE AND VERTICAL HEAT TREATMENT APPARATUS Public/Granted day:2019-09-19
Information query
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