Invention Grant
- Patent Title: Wafer-level process for curving a set of electronic chips
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Application No.: US16937752Application Date: 2020-07-24
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Publication No.: US11424286B2Publication Date: 2022-08-23
- Inventor: Bertrand Chambion , Jean-Philippe Colonna
- Applicant: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1908529 20190726
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/146 ; H01L27/15 ; H01L31/0392 ; H01L31/18 ; H01L33/00 ; H01L33/58 ; H01L33/62

Abstract:
A wafer-level process includes providing a set of electronic chips, including a stack with a set of matrix arrays of pixels, an interconnect layer electrically connected to the set of matrix arrays of pixels, and a first layer, including vias electrically connected to the interconnect layer. The wafer-level process further includes forming metal pillars on the first layer, the pillars being electrically connected to the vias, and forming a material integrally with the first layer, around the metal pillars. The wafer-level process also includes dicing the electronic chips so as to release the thermomechanical stresses to which the stack is subjected. Finally, the wafer-level process includes making the metal pillars coplanar after dicing the electronic chips.
Public/Granted literature
- US20210028222A1 WAFER-LEVEL PROCESS FOR CURVING A SET OF ELECTRONIC CHIPS Public/Granted day:2021-01-28
Information query
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