Invention Grant
- Patent Title: Multi-spacers for quantum dot device gates
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Application No.: US16144148Application Date: 2018-09-27
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Publication No.: US11424324B2Publication Date: 2022-08-23
- Inventor: Hubert C. George , Ravi Pillarisetty , Lester Lampert , James S. Clarke , Nicole K. Thomas , Roman Caudillo , David J. Michalak , Jeanette M. Roberts
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L29/66 ; H01L29/51 ; H01L23/522 ; G06N10/00 ; H01L29/40 ; B82Y10/00 ; H01L29/06 ; H01L29/76 ; H01L29/12 ; H01L29/423 ; H01L29/16 ; B82Y30/00 ; H01L29/778 ; H01L29/82

Abstract:
Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate and an adjacent second gate above the quantum well stack; and a multi-spacer between the first gate and the second gate, wherein the multi-spacer includes a first spacer and a second spacer different from the first spacer, and the first spacer is at least partially between the quantum well stack and the second spacer.
Public/Granted literature
- US20190043953A1 MULTI-SPACERS FOR QUANTUM DOT DEVICE GATES Public/Granted day:2019-02-07
Information query
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