Invention Grant
- Patent Title: Magnetoresistive random-access memory cell having a metal line connection
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Application No.: US16797474Application Date: 2020-02-21
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Publication No.: US11424403B2Publication Date: 2022-08-23
- Inventor: Ruilong Xie , Bruce B. Doris , Michael Rizzolo , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent David K. Mattheis; Maeve Carpenter
- Main IPC: H01L43/02
- IPC: H01L43/02 ; G11C11/16 ; H01L43/12

Abstract:
A method of fabricating an MRAM device, the method including forming a magnetoresistive random-access memory (MRAM) stack comprising a first hard mask, forming sidewall spacers adjacent to the MRAM stack, forming a layer of interconnect metal around and above the MRAM stack, recessing the interconnect metal, forming a layer of a second hard mask over the interconnect metal, and patterning and etching the second hard mask and interconnect metal, forming interconnect metal lines.
Public/Granted literature
- US20210265559A1 MAGNETORESISTIVE RANDOM-ACCESS MEMORY WITH METAL INTERCONNECTS Public/Granted day:2021-08-26
Information query
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