Invention Grant
- Patent Title: Capacitive sensors having temperature stable output
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Application No.: US17043397Application Date: 2019-04-25
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Publication No.: US11427465B2Publication Date: 2022-08-30
- Inventor: Olaf Wunnicke , Frederik Willem Maurits Vanhelmont , Willem Frederik Adrianus Besling , Remco Henricus Wilhelmus Pijnenburg , Casper Van Der Avoort , Anderson Pires Singulani , Martijn Goossens
- Applicant: Sciosense B.V.
- Applicant Address: NL AE Eindhoven
- Assignee: Sciosense B.V.
- Current Assignee: Sciosense B.V.
- Current Assignee Address: NL AE Eindhoven
- Agency: Slater Matsil, LLP
- International Application: PCT/EP2019/060675 WO 20190425
- International Announcement: WO2019/207072 WO 20191031
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G01L9/00 ; G01L9/12

Abstract:
In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.
Public/Granted literature
- US20210163282A1 Capacitive Sensors Having Temperature Stable Output Public/Granted day:2021-06-03
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