Invention Grant
- Patent Title: Manufacturing apparatus and manufacturing method of porous glass base material for optical fiber
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Application No.: US16896623Application Date: 2020-06-09
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Publication No.: US11427495B2Publication Date: 2022-08-30
- Inventor: Naoto Noda , Hitoshi Iinuma
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2019-109084 20190611
- Main IPC: C03B37/014
- IPC: C03B37/014 ; C03B37/016 ; C03B37/07 ; G02B1/04

Abstract:
A manufacturing apparatus of a porous glass base material for optical fiber includes: a liquid mass flow controller for controlling a flow rate of a raw material liquid of an organic siloxane; a vaporizer for mixing the raw material liquid and a carrier gas to vaporize the raw material liquid to form a mixed gas in which a raw material gas and the carrier gas are mixed; a raw material liquid nozzle for ejecting the raw material liquid into the vaporizer; a carrier gas supply pipe for supplying the carrier gas into the vaporizer; a raw material liquid pipe for introducing the raw material liquid into the raw material liquid nozzle; a burner for combusting the mixed gas together with a combustible gas and a combustion supporting gas to produce SiO2 fine particles; a mixed gas pipe; an open/close valve; and a purge gas supply pipe.
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