- Patent Title: Vacuum pump, stator column, base, and exhaust system of vacuum pump
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Application No.: US17253364Application Date: 2019-06-13
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Publication No.: US11428237B2Publication Date: 2022-08-30
- Inventor: Takashi Kabasawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2018-121763 20180627
- International Application: PCT/JP2019/023435 WO 20190613
- International Announcement: WO2020/004055 WO 20200102
- Main IPC: F04D29/32
- IPC: F04D29/32 ; F04D13/06 ; F04D19/04

Abstract:
The present invention provides a vacuum pump that measures the temperature of a rotating portion accurately and at low cost, a stator column of the vacuum pump, a base, and an exhaust system of the vacuum pump at low cost. The vacuum pump according to the present embodiment, the thread groove-type seal for causing some of the purge gas to flow back toward the temperature sensor unit is provided on the downstream side of the purge gas flow path in which the temperature sensor unit is disposed, thereby increasing the pressure of the purge gas in the vicinity of the temperature sensor unit. Thus, with the small amount of purge gas, the gas pressure around the temperature sensor unit can create an intermediate flow or a viscous flow. Consequently, the total amount of purge gas to be supplied can be saved, resulting in cost reduction.
Public/Granted literature
- US20210262484A1 VACUUM PUMP, STATOR COLUMN, BASE, AND EXHAUST SYSTEM OF VACUUM PUMP Public/Granted day:2021-08-26
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