- Patent Title: Angular velocity sensor and angular velocity sensor control method
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Application No.: US16500412Application Date: 2018-04-09
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Publication No.: US11428705B2Publication Date: 2022-08-30
- Inventor: Hirotsugu Suzuki , Kazuma Tsukamoto
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2017-081012 20170417
- International Application: PCT/JP2018/014873 WO 20180409
- International Announcement: WO2018/193890 WO 20181025
- Main IPC: G01P3/48
- IPC: G01P3/48 ; G01P3/483

Abstract:
An angular velocity sensor includes an angular velocity sensor element, a drive circuit, a detection circuit, and a reference potential supply circuit. The angular velocity sensor element has a monitor electrode, a drive electrode, a sense electrode, and a weight. The reference potential supply circuit supplies a reference potential to the angular velocity sensor element. The reference potential supply circuit has a first CV converter, a second CV converter, a comparator, and a reference potential adjustment circuit. The first CV converter is connected to the monitor electrode. The second CV converter is connected to the sense electrode. The comparator compares a frequency of a signal being output from the first CV converter with a frequency of a signal being output from the second CV converter, and outputs a signal depending on a result of the comparison.
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