Invention Grant
- Patent Title: Analysis device and image generation method
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Application No.: US17312203Application Date: 2019-11-28
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Publication No.: US11428712B2Publication Date: 2022-08-30
- Inventor: Shin Uchida
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2018-230769 20181210
- International Application: PCT/JP2019/046565 WO 20191128
- International Announcement: WO2020/121825 WO 20200618
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/02 ; G01R31/28

Abstract:
An analysis device analyzes inspection results of an inspection object which includes inspection target devices having respective electrodes on which needle marks are formed. The analysis device includes a display part for displaying an image, and an image generation part for generating an image to be displayed on the display part. The image generation part generates an analysis image based on information on inspection results with respect to the needle marks. The analysis image includes a needle mark scatter plot image showing positions of the needle marks with respect to the electrodes in each inspection target device in an overlapped manner, an inspection object map image showing a surface of the inspection object and showing needle mark inspection results with respect to the inspection target devices, and a captured image of the electrodes. Display contents of the images are linked with each other.
Public/Granted literature
- US20220026465A1 ANALYSIS DEVICE AND IMAGE GENERATION METHOD Public/Granted day:2022-01-27
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