Invention Grant
- Patent Title: Systems and methods for curing a shaped film
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Application No.: US16661461Application Date: 2019-10-23
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Publication No.: US11429022B2Publication Date: 2022-08-30
- Inventor: Amir Tavakkoli Kermani Ghariehali , Edward Brian Fletcher
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agent Daneil Ratoff
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; B29C35/08 ; B29C43/02 ; G03F7/20 ; G03F9/00 ; B82Y30/00 ; B82Y40/00

Abstract:
Systems and methods for shaping a film. Formable material in an imprint field on the substrate may be contacted with a shaping surface of a template. Outer boundaries of the imprint field correspond to outer boundaries of the shaping surface. Shaping the film includes forming a cured layer within the imprint field while the shaping surface is in contact with the formable material. Shaping the film may include separating the shaping surface from the cured layer. Shaping the film may include moving the template away from the imprint field to a first offset location wherein the outer boundaries of the shaping surface are offset relative to the outer boundaries of the imprint field. Shaping the film may include curing a second portion of the formable material while the template is at the first offset location so as to form the shaped film.
Public/Granted literature
- US20210124260A1 Systems and Methods for Curing a Shaped Film Public/Granted day:2021-04-29
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