Invention Grant
- Patent Title: MEMS tunable capacitor comprising amplified piezo actuator and a method for making the same
-
Application No.: US16822652Application Date: 2020-03-18
-
Publication No.: US11430612B2Publication Date: 2022-08-30
- Inventor: Bahram Ghodsian , Hussein El-Ghoroury
- Applicant: Ostendo Technologies, Inc.
- Applicant Address: US CA Carlsbad
- Assignee: Ostendo Technologies, Inc.
- Current Assignee: Ostendo Technologies, Inc.
- Current Assignee Address: US CA Carlsbad
- Agent W. Eric Boyd, Esq.; Greg Caldwell, Esq.
- Main IPC: H01G5/011
- IPC: H01G5/011 ; B81B3/00 ; H01L41/047 ; H01L41/083
Abstract:
A micromachined tunable capacitor. A pair of first and second MEMS fabricated flexures are flexibly coupled to a piezo actuator drive element configured wherein a stress or strain induced by the piezo actuator drive element urges a first movable capacitor plate element a predetermined distance toward or away from a second capacitor plate element proportional to a predetermined voltage signal.
Information query
