Invention Grant
- Patent Title: Field programmable detector array
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Application No.: US16648288Application Date: 2018-09-14
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Publication No.: US11430629B2Publication Date: 2022-08-30
- Inventor: Yongxin Wang , Zhonghua Dong , Rui-Ling Lai
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- International Application: PCT/EP2018/074833 WO 20180914
- International Announcement: WO2019/053173 WO 20190321
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01L27/146

Abstract:
Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
Public/Granted literature
- US20200219696A1 FIELD PROGRAMMABLE DETECTOR ARRAY Public/Granted day:2020-07-09
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