Invention Grant
- Patent Title: Wafer taping apparatus and method
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Application No.: US16360505Application Date: 2019-03-21
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Publication No.: US11430677B2Publication Date: 2022-08-30
- Inventor: Chien-Yi Lee , Wen-Kuei Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed Intellectual Property Law Group LLP
- Main IPC: B32B37/08
- IPC: B32B37/08 ; H01L21/683 ; H01L21/67 ; G01N21/95 ; G06T7/00

Abstract:
Wafer taping apparatuses and methods are provided for determining whether taping defects are present on a semiconductor wafer, based on image information acquired by an imaging device. In some embodiments, a method includes applying an adhesive tape on a surface of a semiconductor wafer. An imaging device acquires image information associated with the adhesive tape on the semiconductor wafer. The presence or absence of taping defects is determined by defect recognition circuitry based on the acquired image information.
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