Invention Grant
- Patent Title: Conveying device for conveying at least one wafer
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Application No.: US16972955Application Date: 2019-05-28
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Publication No.: US11430683B2Publication Date: 2022-08-30
- Inventor: Heike Raatz , Bas Verhelst , Joachim Frangen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102018006259.8 20180614
- International Application: PCT/EP2019/063849 WO 20190528
- International Announcement: WO2019/238416 WO 20191219
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G54/02

Abstract:
A conveying device includes a transport body configured to carry or hold a wafer, and a stator relative to which the conveying device is designed to move the transport body at least two-dimensionally on a conveying surface. The stator includes several movably arranged actuating magnets, each of which is connected to the stator via an actuating element, and the actuating element is configured to change a position and/or an orientation of the connected actuating magnets relative to the stator. The transport body includes at least two stationary magnets which are connected to the transport body such that the stationary magnets are immovable relative to the transport body, and the stator and the transport body are magnetically coupled by the stationary magnets and the actuating magnets. The device conveys the transport body relative to the stator by controlled positioning and/or orientation of the actuating magnets via the actuating elements.
Public/Granted literature
- US20210249291A1 Conveying Device for Conveying at Least One Wafer Public/Granted day:2021-08-12
Information query
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