Invention Grant
- Patent Title: Wafer placement apparatus and method of manufacturing the same
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Application No.: US16818055Application Date: 2020-03-13
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Publication No.: US11430685B2Publication Date: 2022-08-30
- Inventor: Takanori Sonoda
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JPJP2019-051398 20190319
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H02N13/00 ; H01L21/60

Abstract:
A wafer placement apparatus includes a disc-shaped ceramic plate having an upper surface as a wafer placement surface and in which an electrode is embedded; a disc-shaped cooling plate provided on a lower surface, opposite the wafer placement surface, of the ceramic plate; and a resin adhesive-sheet layer with which a bonding surface as the lower surface of the ceramic plate and a bonding surface as an upper surface of the cooling plate are bonded to each other, wherein at least one of the bonding surface of the ceramic plate and the bonding surface of the cooling plate has a surface roughness Ra that is higher in an outer part of the bonding surface than in an inner part of the bonding surface.
Public/Granted literature
- US20200303230A1 WAFER PLACEMENT APPARATUS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-09-24
Information query
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