Invention Grant
- Patent Title: MIM capacitor with a symmetrical capacitor insulator structure
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Application No.: US17022320Application Date: 2020-09-16
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Publication No.: US11430729B2Publication Date: 2022-08-30
- Inventor: Hsing-Lien Lin , Cheng-Te Lee , Rei-Lin Chu , Chii-Ming Wu , Yeur-Luen Tu , Chung-Yi Yu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/08 ; H01L49/02 ; H01L21/02

Abstract:
Various embodiments of the present application are directed towards a metal-insulator-metal (MIM) capacitor. The MIM capacitor comprises a bottom electrode disposed over a semiconductor substrate. A top electrode is disposed over and overlies the bottom electrode. A capacitor insulator structure is disposed between the bottom electrode and the top electrode. The capacitor insulator structure comprises at least three dielectric structures vertically stacked upon each other. A bottom half of the capacitor insulator structure is a mirror image of a top half of the capacitor insulator structure in terms of dielectric materials of the dielectric structures.
Public/Granted literature
- US20220084935A1 MIM CAPACITOR WITH A SYMMETRICAL CAPACITOR INSULATOR STRUCTURE Public/Granted day:2022-03-17
Information query
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