Invention Grant
- Patent Title: Metal wiring film and method of fabricating thereof, thin film transistor
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Application No.: US16631203Application Date: 2019-09-17
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Publication No.: US11430815B2Publication Date: 2022-08-30
- Inventor: Toru Kimura
- Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., LTD.
- Applicant Address: CN Hubei
- Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., LTD.
- Current Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., LTD.
- Current Assignee Address: CN Hubei
- Agency: Benesch, Friedlander, Coplan & Aronoff, LLP
- Priority: CN201910321838.3 20190422
- International Application: PCT/CN2019/106132 WO 20190917
- International Announcement: WO2020/215595 WO 20201029
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
A metal wiring film, a method for fabricating the same, and a thin film transistor. The metal wiring film includes: a first film layer formed by a nickel-copper alloy, a mass percentage of nickel in the nickel-copper alloy ranges from 30% to 70%; a second film layer disposed above the first film layer, a material forming the second film layer is an aluminum-neodymium alloy, and the mass percentage of neodymium in the aluminum-neodymium alloy ranges from 1% to 5%; a third film layer disposed above the second film layer, a material forming the third film layer is the same as the material forming the first film layer.
Public/Granted literature
- US20210242243A1 METAL WIRING FILM AND METHOD OF FABRICATING THEREOF, THIN FILM TRANSISTOR Public/Granted day:2021-08-05
Information query
IPC分类: