- Patent Title: Integrated circuit devices having through-silicon via structures
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Application No.: US16839173Application Date: 2020-04-03
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Publication No.: US11430824B2Publication Date: 2022-08-30
- Inventor: Sun-hyun Kim , Sang-il Jung , Byung-jun Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0111211 20150806
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L27/146

Abstract:
An integrated circuit (IC) device includes a first substrate and a first structure on a front surface of the first substrate. The first structure includes a first interlayer insulating layer structure including a plurality of first conductive pad layers spaced apart from one another at different levels of the first interlayer insulating layer structure. The IC device includes a second substrate on the first substrate and a second structure on a front surface of the second substrate, which faces the front surface of the first substrate. The second structure includes a second interlayer insulating layer structure bonded to the first interlayer insulating layer structure. A through-silicon via (TSV) structure penetrates the second substrate and the second interlayer insulating layer structure. The TSV structure is in contact with at least two first conductive pad layers of the plurality of first conductive pad layers located at different levels.
Public/Granted literature
- US20200235156A1 INTEGRATED CIRCUIT DEVICES HAVING THROUGH-SILICON VIA STRUCTURES Public/Granted day:2020-07-23
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