Invention Grant
- Patent Title: Semiconductor device and semiconductor memory device
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Application No.: US17198682Application Date: 2021-03-11
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Publication No.: US11430886B2Publication Date: 2022-08-30
- Inventor: Yuta Sato , Tomomasa Ueda , Nobuyoshi Saito , Keiji Ikeda
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2020-155889 20200916
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/12 ; H01L27/13 ; H01L29/24 ; H01L29/423

Abstract:
A semiconductor device of an embodiment includes a substrate, a first electrode, a second electrode, the first electrode provided between the substrate and the second electrode, the oxide semiconductor layer in contact with the first electrode, an oxide semiconductor layer between the first electrode and the second electrode, the oxide semiconductor layer contains Zn and at least one first element selected from In, Ga, Si, Al, and Sn; a conductive layer between the oxide semiconductor layer and the second electrode, the conductive layer in contact with the second electrode, the conductive layer contains O and at least one second element selected from the group consisting of In, Ga, Si, Al, Sn, Zn, and Ti, a gate electrode; and a gate insulating layer between the oxide semiconductor layer and the gate electrode.
Public/Granted literature
- US20220085212A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-03-17
Information query
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