Invention Grant
- Patent Title: Piezoelectric driving device having a detection element at the center of a vibrating portion
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Application No.: US16298066Application Date: 2019-03-11
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Publication No.: US11430938B2Publication Date: 2022-08-30
- Inventor: Tomoaki Takahashi , Akio Konishi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2018-044543 20180312
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/047 ; B41J2/14 ; H02N2/00 ; H02N2/10

Abstract:
A piezoelectric driving device includes a vibrating portion including a piezoelectric element for driving and a piezoelectric element for detection and vibrating by driving of the piezoelectric element for driving, a drive circuit that generates a drive signal for driving the piezoelectric element for driving, and a detection circuit that detects vibration of the vibrating portion based on a detection signal output from the piezoelectric element for detection with the vibration of the vibrating portion, wherein the piezoelectric element for detection is placed in an area containing a center of the vibrating portion.
Public/Granted literature
- US20190280185A1 PIEZOELECTRIC DRIVING DEVICE, ROBOT, ELECTRONIC COMPONENT CONVEYANCE APPARATUS, PRINTER, AND PROJECTOR Public/Granted day:2019-09-12
Information query
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