- Patent Title: Electronic device and method for manufacturing electronic device
-
Application No.: US16984688Application Date: 2020-08-04
-
Publication No.: US11430952B2Publication Date: 2022-08-30
- Inventor: Myoung Sub Kim , Tae Hoon Kim , Beom Seok Lee , Seung Yun Lee , Hwan Jun Zang , Byung Jick Cho , Ji Sun Han
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2020-0027405 20200304
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L27/22 ; H01L43/02 ; H01L43/12

Abstract:
A method for manufacturing an electronic device including a semiconductor memory may include forming a first carbon electrode material, surface-treating the first carbon electrode material to decrease a surface roughness of the first carbon electrode material, and forming a second carbon electrode material on the treated surface of the first carbon electrode material. The second carbon electrode material may have a thickness that is greater than a thickness of the first carbon electrode material.
Public/Granted literature
- US20210280781A1 ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE Public/Granted day:2021-09-09
Information query
IPC分类: