Invention Grant
- Patent Title: Bonded tunable VCSEL with bi-directional actuation
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Application No.: US16674991Application Date: 2019-11-05
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Publication No.: US11431151B2Publication Date: 2022-08-30
- Inventor: James W. Getz , Peter S. Whitney
- Applicant: Excelitas Technologies Corp.
- Applicant Address: US MA Waltham
- Assignee: Excelitas Technologies Corp.
- Current Assignee: Excelitas Technologies Corp.
- Current Assignee Address: US MA Waltham
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01S5/183
- IPC: H01S5/183 ; B81B7/02 ; H01S5/04 ; H01S5/02345 ; H01S5/026 ; H01S5/02
Abstract:
A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.
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