Invention Grant
- Patent Title: Centrally anchored MEMS-based active cooling systems
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Application No.: US17463417Application Date: 2021-08-31
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Publication No.: US11432433B2Publication Date: 2022-08-30
- Inventor: Ananth Saran Yalamarthy , Suryaprakash Ganti , Vikram Mukundan , Seshagiri Rao Madhavapeddy , Prabhu Sathyamurthy , Narayana Prasad Rayapati
- Applicant: Frore Systems Inc.
- Applicant Address: US CA San Jose
- Assignee: Frore Systems Inc.
- Current Assignee: Frore Systems Inc.
- Current Assignee Address: US CA San Jose
- Agency: Van Pelt, Yi & James LLP
- Main IPC: H05K7/20
- IPC: H05K7/20 ; H01L41/04 ; H01L41/047 ; B81B7/00
Abstract:
A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.
Public/Granted literature
- US20210392788A1 CENTRALLY ANCHORED MEMS-BASED ACTIVE COOLING SYSTEMS Public/Granted day:2021-12-16
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