Invention Grant
- Patent Title: Imprint apparatus and method of controlling imprint apparatus
-
Application No.: US17012265Application Date: 2020-09-04
-
Publication No.: US11433608B2Publication Date: 2022-09-06
- Inventor: Hisashi Namba , Noriyasu Hasegawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JPJP2019-165641 20190911
- Main IPC: B29C64/227
- IPC: B29C64/227 ; B29C64/112 ; B29C64/209 ; B41J2/045 ; B41J3/54 ; G03F7/00 ; B29L31/34

Abstract:
An imprint apparatus includes: a substrate stage configured to move a substrate; an ejection unit including a plurality of nozzles and configured to eject an ejection material from the nozzles onto the substrate in synchronization with movement of the substrate stage; and a mold driving mechanism configured to drive a mold on which a pattern is formed to press down the mold onto the substrate. The imprint apparatus determines a relative ejection timing of an abnormal nozzle with respect to a normal nozzle based on ejection properties of the nozzles and a moving direction of the substrate stage, determines an ejection timing of the normal nozzle based on the determined relative ejection timing, and controls a synchronization timing of the substrate stage and the ejection unit based on the determined ejection timing of the normal nozzle.
Public/Granted literature
- US20210069976A1 IMPRINT APPARATUS AND METHOD OF CONTROLLING IMPRINT APPARATUS Public/Granted day:2021-03-11
Information query