Invention Grant
- Patent Title: Transfer device, processing system, and transfer method
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Application No.: US17174755Application Date: 2021-02-12
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Publication No.: US11434087B2Publication Date: 2022-09-06
- Inventor: Toshiaki Kodama
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Fenwick & West LLP
- Priority: JPJP2020-024315 20200217
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G47/90 ; H01L21/687
Abstract:
A transfer device comprises a transfer arm to which a pick is attached and an inclination adjusting mechanism disposed below the transfer arm and configured to adjust an inclination of the transfer arm. The inclination adjusting mechanism includes an upper portion fixed to a lower portion of the transfer arm, a lower portion disposed below the upper portion to face the upper portion, a support portion that rotatably supports the upper portion with respect to the lower portion, and at least two actuators disposed between the upper portion and the lower portion.
Public/Granted literature
- US20210253365A1 TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD Public/Granted day:2021-08-19
Information query
IPC分类:
