Invention Grant
- Patent Title: Surface micromachined structures
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Application No.: US16731997Application Date: 2019-12-31
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Publication No.: US11434130B2Publication Date: 2022-09-06
- Inventor: Patrick Ian Oden , James Norman Hall
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Charles A. Brill; Frank D. Cimino
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G03B21/00 ; B81B3/00 ; H04N13/365 ; H04N5/74
Abstract:
Described examples include an apparatus having a substrate with a substrate surface. The apparatus also includes an element with a planar surface facing the substrate surface and with a nonplanar surface opposite the planar surface facing away from the substrate surface.
Public/Granted literature
- US20210198103A1 SURFACE MICROMACHINED STRUCTURES Public/Granted day:2021-07-01
Information query
