Invention Grant
- Patent Title: Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body
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Application No.: US16830025Application Date: 2020-03-25
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Publication No.: US11434174B2Publication Date: 2022-09-06
- Inventor: Takashi Ikeda , Hajime Ishii , Kenji Fujimoto , Naoyuki Satoh , Nobuyuki Nagayama , Koichi Murakami , Takahiro Murakami
- Applicant: NIPPON TUNGSTEN CO., LTD. , TOKYO ELECTRON LIMITED
- Applicant Address: JP Fukuoka; JP Tokyo
- Assignee: NIPPON TUNGSTEN CO., LTD.,TOKYO ELECTRON LIMITED
- Current Assignee: NIPPON TUNGSTEN CO., LTD.,TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Fukuoka; JP Tokyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: JPJP2019-072008 20190404
- Main IPC: C04B35/56
- IPC: C04B35/56 ; C23F4/00 ; H01L21/67 ; H01J37/32

Abstract:
A member for a plasma processing apparatus has a tungsten carbide phase, and a sub-phase including at least one selected from the group consisting of phase I to IV, and phase V, in which the phase I is a carbide phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase II is a nitride phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase III is a carbonitride phase containing, as a constituent element, at least one of the elements of Group IV, Group V, and Group VI of the periodic table excluding W, the phase IV is a carbon phase, the phase V is a composite carbide phase which is represented by a formula WxMyCz.
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