Invention Grant
- Patent Title: Deposition mask apparatus, mask support mechanism, and production method for deposition mask apparatus
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Application No.: US17304751Application Date: 2021-06-25
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Publication No.: US11434559B2Publication Date: 2022-09-06
- Inventor: Daigo Aoki , Chikao Ikenaga , Isao Inoue
- Applicant: Dai Nippon Printing Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Burr & Brown, PLLC
- Priority: JPJP2019-019835 20190206
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/24 ; H01L51/00 ; B05C21/00

Abstract:
A deposition mask apparatus including a frame, a supporter including a plurality of supporting members fixed to the frame, and a deposition mask fixed to the frame is provided. The plurality of supporting members include at least a first supporting member that is closest to an intermediate position between a third portion and a fourth portion of the frame and a second supporting member that is located closer to the third portion of the frame than the first supporting member. The first supporting member in a state of warping downward from the frame with a first warping amount supports the deposition mask from below. The second supporting member in a state of warping downward from the frame with a second warping amount that is smaller than the first warping amount supports the deposition mask from below.
Public/Granted literature
- US20210317562A1 DEPOSITION MASK APPARATUS, MASK SUPPORT MECHANISM, AND PRODUCTION METHOD FOR DEPOSITION MASK APPARATUS Public/Granted day:2021-10-14
Information query
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