Invention Grant
- Patent Title: Plating apparatus
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Application No.: US16796782Application Date: 2020-02-20
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Publication No.: US11434580B2Publication Date: 2022-09-06
- Inventor: Tomonori Hirao , Gaku Yamasaki , Takahiro Abe , Toshio Yokoyama
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP2019-036719 20190228
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D17/02 ; C25D17/08

Abstract:
To provide a plating apparatus that prevents or reduces a diversion of an electric field. According to one embodiment, a plating apparatus for performing a plating process on a substrate held onto a substrate holder is provided. The plating apparatus includes a plating tank configured to receive the substrate holder holding the substrate, a block member that extends to an inside of the plating tank from a wall surface of the inside of the plating tank, and is movable inside the plating tank, and a moving mechanism configured to move the block member toward the substrate holder disposed inside the plating tank.
Public/Granted literature
- US20200277709A1 PLATING APPARATUS Public/Granted day:2020-09-03
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