Invention Grant
- Patent Title: Wafer scale bonded active photonics interposer
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Application No.: US16909557Application Date: 2020-06-23
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Publication No.: US11435523B2Publication Date: 2022-09-06
- Inventor: Douglas Coolbaugh , Douglas La Tulipe , Gerald Leake
- Applicant: The Research Foundation for The State University of New York
- Applicant Address: US NY Albany
- Assignee: The Research Foundation for The State University of New York
- Current Assignee: The Research Foundation for The State University of New York
- Current Assignee Address: US NY Albany
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Main IPC: G02B6/12
- IPC: G02B6/12 ; H01L21/48 ; H01L23/498 ; H01L31/02 ; H01L31/0232 ; G02B6/13 ; G02B6/42 ; H01L23/00 ; G02B6/43 ; H01L27/12 ; H01L21/18 ; H01L21/762 ; H01L25/18 ; H01L25/00 ; H01L25/065

Abstract:
There is set forth herein an optoelectrical system comprising: a conductive path for supplying an input voltage to a photonics device, wherein the conductive path comprises a base structure through via extending through a substrate and a photonics structure through via, the photonics structure through via extending through a photonics device dielectric stack. There is set forth herein an optoelectrical system comprising: a second structure fusion bonded to an interposer base dielectric stack of a first structure. There is set forth herein a method comprising: fabricating a second wafer built structure using a second wafer, the second wafer built structure defining a photonics structure and having a photonics device integrated into a photonics device dielectric stack of the second wafer based structure; and wafer scale bonding the second wafer built structure to a first wafer built structure.
Public/Granted literature
- US20200319403A1 WAFER SCALE BONDED ACTIVE PHOTONICS INTERPOSER Public/Granted day:2020-10-08
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