Invention Grant
- Patent Title: Housing case for crystal oscillator
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Application No.: US17155766Application Date: 2021-01-22
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Publication No.: US11437256B2Publication Date: 2022-09-06
- Inventor: Yuki Kaida , Yousuke Oguma
- Applicant: ULVAC, INC.
- Applicant Address: JP Kanagawa
- Assignee: ULVAC, INC.
- Current Assignee: ULVAC, INC.
- Current Assignee Address: JP Kanagawa
- Agency: Cermak Nakajima & McGowan LLP
- Agent Tomoko Nakajima
- Priority: JPJP2020-026370 20200219
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A housing case for a crystal oscillator monitors a film thickness of a thin film to be formed on a surface of the crystal oscillator, the monitoring being performed by measuring a resonance frequency during film formation in a vacuum atmosphere. The housing case has: a case main body having disposed on an upper surface thereof a plurality of first recessed parts each being capable of housing therein a crystal oscillator in a horizontal posture with a main surface thereof facing in an up-and-down direction; a first cap body detachably mounted on the case main body from an upper side thereof; and an engaging means for engaging the first cap body relative to the case main body. The engaging means is so constructed and arranged that, in a state in which the first cap body is engaged with the case main body, the crystal oscillators housed in the first recessed parts are restrained from jumping out of position.
Public/Granted literature
- US20210257238A1 Housing Case for Crystal Oscillator Public/Granted day:2021-08-19
Information query
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