Invention Grant
- Patent Title: Workpiece storage system, method of storing workpiece, and method of transferring workpiece using the same
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Application No.: US16520599Application Date: 2019-07-24
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Publication No.: US11437258B2Publication Date: 2022-09-06
- Inventor: Tzu-Chi Chiu , Jen-Ti Wang , Ting-Wei Wang , Kuo-Fong Chuang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; H01L21/67 ; G05B15/02
Abstract:
A method for storage a workpiece used in fabrication of a semiconductor device includes disposing the workpiece on a workpiece carrier, disposing the workpiece carrier with the workpiece in a workpiece container via a workpiece storage system, identifying a content of the workpiece container, and adjusting a storage condition inside the workpiece container in response to the content of the workpiece container via the workpiece storage system.
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