- Patent Title: Semiconductor memory device and method for manufacturing the same
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Application No.: US17228231Application Date: 2021-04-12
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Publication No.: US11437384B1Publication Date: 2022-09-06
- Inventor: Jr-Chiuan Wang , Rou-Wei Wang , Wei-Yu Chen
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
The present disclosure provides a semiconductor memory device and a method for manufacturing the semiconductor memory device. The method includes steps of: providing a substrate including a storage area and a peripheral area, wherein the storage area has a contact plug, a bit line structure adjacent to the contact plug, an air gap between the bit line structure and the contact plug, a barrier layer conformally overlaying the bit line structure, and a landing pad above the barrier layer; forming a trench between the storage area and the peripheral area; filling the trench with a nitride material; forming a first oxide layer above the nitride material in the trench and on the landing pad; forming a nitride layer above the first oxide layer; and forming a second oxide layer above the nitride layer.
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