Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices
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Application No.: US16139775Application Date: 2018-09-24
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Publication No.: US11437397B2Publication Date: 2022-09-06
- Inventor: Euntaek Jung , JoongShik Shin , SangJun Hong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0015259 20180207
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/11582 ; H01L27/1157 ; H01L27/11573 ; H01L27/11565 ; H01L27/11575 ; H01L29/423

Abstract:
A three-dimensional (3D) semiconductor memory device includes a source conductive pattern on a substrate and extending in parallel to a top surface of the substrate, and an electrode structure including an erase control gate electrode, a ground selection gate electrode, cell gate electrodes, and a string selection gate electrode, which are sequentially stacked on the source conductive pattern in a first direction perpendicular to the top surface of the substrate.
Public/Granted literature
- US20190244970A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2019-08-08
Information query
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