Invention Grant
- Patent Title: Thermal extraction of single layer transfer integrated circuits
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Application No.: US17123881Application Date: 2020-12-16
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Publication No.: US11437404B2Publication Date: 2022-09-06
- Inventor: Abhijeet Paul , Richard James Dowling , Hiroshi Yamada , Alain Duvallet , Ronald Eugene Reedy
- Applicant: pSemi Corporation
- Applicant Address: US CA San Diego
- Assignee: pSemi Corporation
- Current Assignee: pSemi Corporation
- Current Assignee Address: US CA San Diego
- Agency: Jaquez Land Greenhaus & McFarland LLP
- Agent John Land, Esq.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/12 ; H01L21/48 ; H01L21/8234 ; H01L21/84 ; H01L23/373 ; H01L27/092

Abstract:
A FET IC structure made using a back-side access process that mitigates or eliminates thermal conductivity problems. In some embodiments, electrically-isolated thermal paths are formed adjacent the FET and configured to conduct heat laterally away from the FET to generally orthogonal thermal pathways, and thence to thermal pads externally accessible at the “top” of the completed IC. In some embodiments having a thermally-conductive handle wafer, electrically-isolated thermal paths are formed adjacent a FET and configured to conduct heat laterally away from the FET. Thermal vias are formed sufficiently so as to be in thermal contact with the handle wafer and with the conventional metallization layers of the device superstructure, at least one of which is in thermal contact with the lateral thermal paths. In some embodiments, the lateral thermal paths may use dummy gates configured to conduct heat laterally away from a FET to generally orthogonal thermal pathways.
Public/Granted literature
- US20210217776A1 Thermal Extraction of Single Layer Transfer Integrated Circuits Public/Granted day:2021-07-15
Information query
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