Invention Grant
- Patent Title: Split-gate flash memory cell and fabrication method thereof
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Application No.: US17178269Application Date: 2021-02-18
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Publication No.: US11437475B2Publication Date: 2022-09-06
- Inventor: Chih-Haw Lee , Tzu-Ping Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN202110019031.1 20210107
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/788 ; H01L21/32 ; H01L21/321 ; H01L29/423 ; H01L29/66 ; H01L21/3213 ; H01L21/311

Abstract:
A split-gate flash memory cell includes a semiconductor substrate having thereon a select gate oxide layer and a floating gate oxide layer. A floating gate is disposed on the floating gate oxide layer. A football-shaped oxide layer is disposed on the floating gate. The floating gate includes tips under the football-shaped oxide layer. A select gate is disposed on the select gate oxide layer and extended onto the football-shaped oxide layer. An inter-poly oxide layer is between the select gate and the floating gate. The inter-poly oxide layer has a thickness smaller than a thickness of the select gate oxide layer. A source region is formed in the semiconductor substrate and adjacent to the floating gate. A drain region is formed in the semiconductor substrate and adjacent to the select gate.
Public/Granted literature
- US20220216311A1 SPLIT-GATE FLASH MEMORY CELL AND FABRICATION METHOD THEREOF Public/Granted day:2022-07-07
Information query
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