Invention Grant
- Patent Title: Ultrasonic device and ultrasonic apparatus
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Application No.: US16817754Application Date: 2020-03-13
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Publication No.: US11437564B2Publication Date: 2022-09-06
- Inventor: Chikara Kojima , Koji Ohashi , Hironori Suzuki
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-047989 20190315
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H01L41/053 ; H01L41/047

Abstract:
An ultrasonic device includes a base member including a first surface and a second surface different from the first surface, a vibration plate provided at the first surface of the base member, and a piezoelectric element provided at the vibration plate. The base member includes a hole formed from the first surface to the second surface, and a wall portion surrounding the hole. The vibration plate includes, when viewed in a direction from the first surface toward the second surface, a supporting portion overlapping the wall portion, and a blocking portion that overlaps the hole and blocks the hole. The piezoelectric element is laminated at the blocking portion. The supporting portion has a first Young's modulus. The blocking portion includes a first blocking portion having the first Young's modulus and a second blocking portion having a second Young's modulus smaller than the first Young's modulus.
Public/Granted literature
- US20200295251A1 ULTRASONIC DEVICE AND ULTRASONIC APPARATUS Public/Granted day:2020-09-17
Information query
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