Invention Grant
- Patent Title: Piezoelectric element and liquid ejecting head
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Application No.: US16114286Application Date: 2018-08-28
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Publication No.: US11437565B2Publication Date: 2022-09-06
- Inventor: Masayuki Omoto , Ichiro Asaoka , Hiromu Miyazawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-163922 20170829
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/187 ; H01L41/08 ; H01L41/318 ; H01L41/09

Abstract:
A piezoelectric element including an electrode and a piezoelectric layer provided on the electrode and having a perovskite structure including lead, zirconium, and titanium is provided. A radial distribution function obtained from an extended X-ray absorption fine structure of an L3 absorption edge of lead in an X-ray absorption spectrum of the piezoelectric layer at an interface with the electrode satisfies a formula (1) below A/B≤1 (1) (in the formula (1), A represents an intensity of a peak attributable to oxygen atoms closest to lead atoms; and B represents an intensity of a peak attributable to oxygen atoms second closest to the lead atoms).
Public/Granted literature
- US20190067557A1 Piezoelectric Element And Liquid Ejecting Head Public/Granted day:2019-02-28
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