A method of making an anode for use in an energy storage device includes providing a current collector having an electrically conductive layer and a metal oxide layer overlaying over the electrically conductive layer. The metal oxide layer has an average thickness of at least 0.01 μm. A continuous porous lithium storage layer is deposited onto the metal oxide layer by a CVD process. The anode is thermally treated after deposition of the continuous porous lithium storage layer is complete and prior to battery assembly. The thermal treatment includes heating the anode to a temperature in a range of 100° C. to 600° C. for a time period in a range of 0.1 min to 120 min. The anode may be incorporated into a lithium ion battery along with a cathode. The cathode may include sulfur or selenium and the anode may be prelithiated.