Invention Grant
- Patent Title: Surface acoustic wave device on composite substrate
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Application No.: US17042768Application Date: 2019-03-20
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Publication No.: US11437973B2Publication Date: 2022-09-06
- Inventor: Sylvain Ballandras , Florent Bernard , Emilie Courjon
- Applicant: FREC'N'SYS
- Applicant Address: FR Besançon
- Assignee: FREC'N'SYS
- Current Assignee: FREC'N'SYS
- Current Assignee Address: FR Besançon
- Agency: TraskBritt
- Priority: FR1852687 20180328
- International Application: PCT/EP2019/056933 WO 20190320
- International Announcement: WO2019/185415 WO 20191003
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/25 ; H03H9/64

Abstract:
A surface acoustic wave device using a longitudinally polarized guided wave comprises a composite substrate comprising a piezoelectric layer formed over a base substrate, wherein the crystalline orientation of the piezoelectric layer with respect to the base substrate is such that, the phase velocity of the longitudinally polarized wave is below the critical phase velocity of the base substrate at which wave guiding within the piezoelectric layer vanishes. A method of fabrication of such surface acoustic wave device is also disclosed.
Public/Granted literature
- US20210028760A1 SURFACE ACOUSTIC WAVE DEVICE ON COMPOSITE SUBSTRATE Public/Granted day:2021-01-28
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