Invention Grant
- Patent Title: Bulk acoustic resonator and filter device
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Application No.: US16939344Application Date: 2020-07-27
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Publication No.: US11437975B2Publication Date: 2022-09-06
- Inventor: Chang Hyun Lim , Tae Hun Lee , Yong Suk Kim , Moon Chul Lee , Sang Kee Yoon
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2019-0110915 20190906,KR10-2020-0040836 20200403
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H9/05 ; H03H9/02 ; H03H9/56 ; H03H9/17 ; H03H9/10

Abstract:
A bulk acoustic resonator includes: a substrate; a first electrode disposed on the substrate; a piezoelectric layer disposed to cover at least a portion of the first electrode; a second electrode disposed to cover at least a portion of the piezoelectric layer; and an insertion layer disposed below a partial region of the piezoelectric layer. A thickness of the first electrode in an active region in which the first electrode, the piezoelectric layer, and the second electrode overlap one another is less than a thickness of a region outside the active region. An angle of inclination of an internal side surface of the insertion layer is different from an angle of inclination of an external side surface of the insertion layer.
Public/Granted literature
- US20210075396A1 BULK ACOUSTIC RESONATOR AND FILTER DEVICE Public/Granted day:2021-03-11
Information query
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